Sfoglia per Autore
Vacancy-gettering in silicon: Cavities and helium-implantation
1999 Corni, Federico; Tonini, Rita; Frabboni, Stefano; Nobili, Carlo Emanuele; Calzolari, G; Masetti, S; Tamarozzi, P; Pavia, G; Cerofolini, Gf
Lattice strain and static disorder determination in Si/Si1-xGex/Si heterostructures by convergent beam electron diffraction
1999 Frabboni, Stefano; Gambetta, F; Armigliato, A; Balboni, R; Balboni, S; Cembali, F.
Strain determination in submicron isolation structures by TEM/CBED
1999 Armigliato, A; Balboni, R; Balboni, S; Frabboni, Stefano; Tixier, A; Carnevale, Gp; Colpani, P; Pavia, G; Marmiroli, A.
Thermal desorption spectra from cavities in helium-implanted silicon
2000 Cerofolini, Gf; Calzolari, G; Corni, Federico; Frabboni, Stefano; Nobili, Carlo Emanuele; Ottaviani, Giampiero; Tonini, Rita
A novel Monte-Carlo based method for quantitative thin film X-ray microanalysis
2000 Armigliato, A; Balboni, R; Frabboni, Stefano; Rosa, R.
Dynamical simulation of LACBED patterns in cross-sectioned heterostructures
2000 Wu, F; Armigliato, A; Balboni, R; Frabboni, Stefano
Hydrogen and helium bubbles in silicon
2000 G. F., Cerofolini; Corni, Federico; Frabboni, Stefano; Nobili, Carlo Emanuele; Ottaviani, Giampiero; Tonini, Rita
Large angle convergent beam electron diffraction strain measurements in high dose helium implanted silicon
2000 Gambetta, Francesca; Frabboni, Stefano; Tonini, Rita; Corni, Federico
TEM/CBED determination of strain in silicon-based submicrometric electronic devices
2000 Armigliatoa, A; Balboni, R; Balboni, S; Frabboni, Stefano; Tixier, A; Carnevale, Gp; Colpani, P; Pavia, G; Marmiroli, A.
Strain characterisation of shallow trench isolation structures on a nanometer scale by convergent beam electron diffraction
2001 Armigliato, A; Balboni, R; Frabboni, Stefano; Benedetti, A; Cullis, Ag; Carnevale, Gp; Colpani, P; Pavia, G.
Strain analysis in sub-micron silicon devices by TEM/CBED
2001 Armigliato, A; Balboni, R; Frabboni, Stefano; Benedetti, A; Cullis, Ag; Pavia, G.
Strain characterisation at the nm scale of deep sub-micron devices by convergent-beam electron diffraction
2002 Armigliato, A; Balboni, R; Benedetti, A; Carnevale, Gp; Cullis, Ag; Frabboni, Stefano; Piccolo, D.
LATTICE STRAIN AND STATIC DISORDER IN HYDROGEN IMPLANTED AND ANNEALED SINGLE CRYSTAL SILICON AS DETERMINED BY LARGE ANGLE CONVERGENT BEAM ELECTRON DIFFRACTION
2002 Frabboni, Stefano
Strain Induced by Ti Salicidation in Sub-quarter-micron CMOS Devices, as Measured by TEM/CBED
2002 Benedetti, A.; Cullis, A. G.; Armigliato, A.; Balboni, R.; Frabboni, Stefano; Mastracchio, G. F.; Pavia, G.
Strain analysis in submicron electron devices by convergent beam electron diffraction
2002 A., Armigliato; R., Balboni; Frabboni, Stefano; A. BENEDETTI AND A. G., Cullis
Application of convergent beam electron diffraction to two-dimensional strain mapping in silicon devices
2003 A., Armigliato; R., Balboni; Gp, Carnevale; G., Pavia; D., Piccolo; Frabboni, Stefano; A., Benedetti; Ag, Cullis
Combined HREM and theoretical analysis of SiC/Si interface
2003 V., Grillo; Frabboni, Stefano; G., Cicero; G., Savini; AND A., Catellani
Techniques for mechanical strain analysis in sub-micrometer structures: TEM/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling
2003 I., De Wolf; V., Senez; R., Balboni; A., Armigliato; Frabboni, Stefano; A., Cedola; S., Lagomarsino
Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
2003 V., Senez; A., Armigliato; I., De Wolf; G. P., Carnevale; R., Balboni; Frabboni, Stefano; A., Benedetti
Physical-Chemical Evolution of Hf-aluminates upon Thermal Treatments
2003 B., Crivelli; M., Alessandri; S., Alberici; D., Brazzelli; A. C., Elbaz; Frabboni, Stefano; G., Ghidini; J. W., Maes; G., Ottaviani; G., Pavia; C., Wiemer
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
Vacancy-gettering in silicon: Cavities and helium-implantation | 1-gen-1999 | Corni, Federico; Tonini, Rita; Frabboni, Stefano; Nobili, Carlo Emanuele; Calzolari, G; Masetti, S; Tamarozzi, P; Pavia, G; Cerofolini, Gf | |
Lattice strain and static disorder determination in Si/Si1-xGex/Si heterostructures by convergent beam electron diffraction | 1-gen-1999 | Frabboni, Stefano; Gambetta, F; Armigliato, A; Balboni, R; Balboni, S; Cembali, F. | |
Strain determination in submicron isolation structures by TEM/CBED | 1-gen-1999 | Armigliato, A; Balboni, R; Balboni, S; Frabboni, Stefano; Tixier, A; Carnevale, Gp; Colpani, P; Pavia, G; Marmiroli, A. | |
Thermal desorption spectra from cavities in helium-implanted silicon | 1-gen-2000 | Cerofolini, Gf; Calzolari, G; Corni, Federico; Frabboni, Stefano; Nobili, Carlo Emanuele; Ottaviani, Giampiero; Tonini, Rita | |
A novel Monte-Carlo based method for quantitative thin film X-ray microanalysis | 1-gen-2000 | Armigliato, A; Balboni, R; Frabboni, Stefano; Rosa, R. | |
Dynamical simulation of LACBED patterns in cross-sectioned heterostructures | 1-gen-2000 | Wu, F; Armigliato, A; Balboni, R; Frabboni, Stefano | |
Hydrogen and helium bubbles in silicon | 1-gen-2000 | G. F., Cerofolini; Corni, Federico; Frabboni, Stefano; Nobili, Carlo Emanuele; Ottaviani, Giampiero; Tonini, Rita | |
Large angle convergent beam electron diffraction strain measurements in high dose helium implanted silicon | 1-gen-2000 | Gambetta, Francesca; Frabboni, Stefano; Tonini, Rita; Corni, Federico | |
TEM/CBED determination of strain in silicon-based submicrometric electronic devices | 1-gen-2000 | Armigliatoa, A; Balboni, R; Balboni, S; Frabboni, Stefano; Tixier, A; Carnevale, Gp; Colpani, P; Pavia, G; Marmiroli, A. | |
Strain characterisation of shallow trench isolation structures on a nanometer scale by convergent beam electron diffraction | 1-gen-2001 | Armigliato, A; Balboni, R; Frabboni, Stefano; Benedetti, A; Cullis, Ag; Carnevale, Gp; Colpani, P; Pavia, G. | |
Strain analysis in sub-micron silicon devices by TEM/CBED | 1-gen-2001 | Armigliato, A; Balboni, R; Frabboni, Stefano; Benedetti, A; Cullis, Ag; Pavia, G. | |
Strain characterisation at the nm scale of deep sub-micron devices by convergent-beam electron diffraction | 1-gen-2002 | Armigliato, A; Balboni, R; Benedetti, A; Carnevale, Gp; Cullis, Ag; Frabboni, Stefano; Piccolo, D. | |
LATTICE STRAIN AND STATIC DISORDER IN HYDROGEN IMPLANTED AND ANNEALED SINGLE CRYSTAL SILICON AS DETERMINED BY LARGE ANGLE CONVERGENT BEAM ELECTRON DIFFRACTION | 1-gen-2002 | Frabboni, Stefano | |
Strain Induced by Ti Salicidation in Sub-quarter-micron CMOS Devices, as Measured by TEM/CBED | 1-gen-2002 | Benedetti, A.; Cullis, A. G.; Armigliato, A.; Balboni, R.; Frabboni, Stefano; Mastracchio, G. F.; Pavia, G. | |
Strain analysis in submicron electron devices by convergent beam electron diffraction | 1-gen-2002 | A., Armigliato; R., Balboni; Frabboni, Stefano; A. BENEDETTI AND A. G., Cullis | |
Application of convergent beam electron diffraction to two-dimensional strain mapping in silicon devices | 1-gen-2003 | A., Armigliato; R., Balboni; Gp, Carnevale; G., Pavia; D., Piccolo; Frabboni, Stefano; A., Benedetti; Ag, Cullis | |
Combined HREM and theoretical analysis of SiC/Si interface | 1-gen-2003 | V., Grillo; Frabboni, Stefano; G., Cicero; G., Savini; AND A., Catellani | |
Techniques for mechanical strain analysis in sub-micrometer structures: TEM/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling | 1-gen-2003 | I., De Wolf; V., Senez; R., Balboni; A., Armigliato; Frabboni, Stefano; A., Cedola; S., Lagomarsino | |
Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy | 1-gen-2003 | V., Senez; A., Armigliato; I., De Wolf; G. P., Carnevale; R., Balboni; Frabboni, Stefano; A., Benedetti | |
Physical-Chemical Evolution of Hf-aluminates upon Thermal Treatments | 1-gen-2003 | B., Crivelli; M., Alessandri; S., Alberici; D., Brazzelli; A. C., Elbaz; Frabboni, Stefano; G., Ghidini; J. W., Maes; G., Ottaviani; G., Pavia; C., Wiemer |
Legenda icone
- file ad accesso aperto
- file disponibili sulla rete interna
- file disponibili agli utenti autorizzati
- file disponibili solo agli amministratori
- file sotto embargo
- nessun file disponibile