hermal desorption spectrometry (TDS) has been applied to investigate the thermal evolution of vacancy-like defects in helium-implanted (100) silicon samples with a dose of 2x1016 cm-2 at 20 keV. The measured spectra present features which can be interpreted as fingerprints of the modifications occurring in the sample. The defects that are recognized which affect the desorption are: thermally unstable helium-vacancy complexes, pressurized gas bubbles organized in planar structures (cracks) and thermally stable cavities. The attribution is supported by the results obtained by complementary techniques, such elastic recoil detection, channeling Rutherford backscattering spectrometry, cross sectional transmission electron microscopy and positron annihilation spectroscopy which have been employed on isothermally pre-annealed samples in the range 100-800oC
Evolution of vacancy-like defects in He-implanted (100) Si studied by thermal desorption spectrometry / Corni, Federico; G., Calzolari; Gambetta, Francesca; Nobili, Carlo Emanuele; Tonini, Rita; Zapparoli, Mauro. - In: MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY. - ISSN 0921-5107. - STAMPA. - 71:1-3(2000), pp. 207-212. [10.1016/S0921-5107(99)00376-1]
Evolution of vacancy-like defects in He-implanted (100) Si studied by thermal desorption spectrometry
CORNI, Federico;GAMBETTA, Francesca;NOBILI, Carlo Emanuele;TONINI, Rita;ZAPPAROLI, Mauro
2000
Abstract
hermal desorption spectrometry (TDS) has been applied to investigate the thermal evolution of vacancy-like defects in helium-implanted (100) silicon samples with a dose of 2x1016 cm-2 at 20 keV. The measured spectra present features which can be interpreted as fingerprints of the modifications occurring in the sample. The defects that are recognized which affect the desorption are: thermally unstable helium-vacancy complexes, pressurized gas bubbles organized in planar structures (cracks) and thermally stable cavities. The attribution is supported by the results obtained by complementary techniques, such elastic recoil detection, channeling Rutherford backscattering spectrometry, cross sectional transmission electron microscopy and positron annihilation spectroscopy which have been employed on isothermally pre-annealed samples in the range 100-800oC
Pubblicazioni consigliate
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris
