In this paper we present an analysis of the impact of channel compositional variations on the total threshold voltage variability in nanoscale III-V MOSFETs. The analysis is carried out on a template Dual-Gate Ultra-Thin Body (DG-UTB) MOSFET through TCAD simulations in Sentaurus by Synopsys. The Impedance Field Method (IFM) is employed to evaluate statistical variability for five different sources: Random Dopant Fluctuation (RDF), Work Function Fluctuation (WFF), Body- and Gate-Line Edge Roughness (B-LER and G-LER) and Band Gap Fluctuation (BGF). BGF arises due to the compositional variations of Indium in the compound semiconductor composing the channel, namely InGaAs. Our analysis shows that, by appropriately modeling band gap fluctuations, it is possible to identify a worst-case total relative Vt variability for different amounts of Indium mole fraction variations, providing technologists with an important reference. Side-effects of channel compositional variations on other variability sources are evaluated as well, and are found to have a non-negligible impact on B-LER only.

On the impact of channel compositional variations on total threshold voltage variability in nanoscale InGaAs MOSFETs / Zagni, Nicolo; Puglisi, Francesco Maria; Pavan, Paolo; Verzellesi, Giovanni. - 2018:(2018), pp. 105-108. ((Intervento presentato al convegno 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2018 tenutosi a Granada, Spain nel March 19-21, 2018 [10.1109/ULIS.2018.8354745].

On the impact of channel compositional variations on total threshold voltage variability in nanoscale InGaAs MOSFETs

Zagni, Nicolo;Puglisi, Francesco Maria;Pavan, Paolo;Verzellesi, Giovanni
2018

Abstract

In this paper we present an analysis of the impact of channel compositional variations on the total threshold voltage variability in nanoscale III-V MOSFETs. The analysis is carried out on a template Dual-Gate Ultra-Thin Body (DG-UTB) MOSFET through TCAD simulations in Sentaurus by Synopsys. The Impedance Field Method (IFM) is employed to evaluate statistical variability for five different sources: Random Dopant Fluctuation (RDF), Work Function Fluctuation (WFF), Body- and Gate-Line Edge Roughness (B-LER and G-LER) and Band Gap Fluctuation (BGF). BGF arises due to the compositional variations of Indium in the compound semiconductor composing the channel, namely InGaAs. Our analysis shows that, by appropriately modeling band gap fluctuations, it is possible to identify a worst-case total relative Vt variability for different amounts of Indium mole fraction variations, providing technologists with an important reference. Side-effects of channel compositional variations on other variability sources are evaluated as well, and are found to have a non-negligible impact on B-LER only.
2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2018
Granada, Spain
March 19-21, 2018
2018
105
108
Zagni, Nicolo; Puglisi, Francesco Maria; Pavan, Paolo; Verzellesi, Giovanni
On the impact of channel compositional variations on total threshold voltage variability in nanoscale InGaAs MOSFETs / Zagni, Nicolo; Puglisi, Francesco Maria; Pavan, Paolo; Verzellesi, Giovanni. - 2018:(2018), pp. 105-108. ((Intervento presentato al convegno 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2018 tenutosi a Granada, Spain nel March 19-21, 2018 [10.1109/ULIS.2018.8354745].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/1172238
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