2.2 MeV He-4(+) and 7 MeV N-15(2+) ion beams have been used to investigate, by in situ measurements, the hydrogen desorption processes in SiO2 thin films deposited by plasma enhanced chemical vapor deposition (PECVD). An effective cross-section of 3 x 10(-16) cm(2) for He and 17 x 10(-16) cm(2) for N has been measured for the ion-thin-film interaction phenomena, The structure crystalline silicon/thermally grown SiO2/PECVD film has also been investigated for the hydrogen radiation-enhanced diffusion in thermally grown SiO2. The data are consistent with a diffusion process with a diffusion coefficient of (5.0 +/- 0.5) x 10(-26) cm(2)/ion from a constant source at a concentration C-0 = (2.5 +/- 0.2) x 10(21) at/cm(3).

Radiation enhanced transport of hydrogen in SiO2 / Corni, Federico; Monelli, A; Ottaviani, Giampiero; Tonini, Rita; Queirolo, G; Zanotti, L.. - In: JOURNAL OF NON-CRYSTALLINE SOLIDS. - ISSN 0022-3093. - STAMPA. - 216:(1997), pp. 71-76. [10.1016/S0022-3093(97)00174-9]

Radiation enhanced transport of hydrogen in SiO2

CORNI, Federico;OTTAVIANI, Giampiero;TONINI, Rita;
1997

Abstract

2.2 MeV He-4(+) and 7 MeV N-15(2+) ion beams have been used to investigate, by in situ measurements, the hydrogen desorption processes in SiO2 thin films deposited by plasma enhanced chemical vapor deposition (PECVD). An effective cross-section of 3 x 10(-16) cm(2) for He and 17 x 10(-16) cm(2) for N has been measured for the ion-thin-film interaction phenomena, The structure crystalline silicon/thermally grown SiO2/PECVD film has also been investigated for the hydrogen radiation-enhanced diffusion in thermally grown SiO2. The data are consistent with a diffusion process with a diffusion coefficient of (5.0 +/- 0.5) x 10(-26) cm(2)/ion from a constant source at a concentration C-0 = (2.5 +/- 0.2) x 10(21) at/cm(3).
216
71
76
Radiation enhanced transport of hydrogen in SiO2 / Corni, Federico; Monelli, A; Ottaviani, Giampiero; Tonini, Rita; Queirolo, G; Zanotti, L.. - In: JOURNAL OF NON-CRYSTALLINE SOLIDS. - ISSN 0022-3093. - STAMPA. - 216:(1997), pp. 71-76. [10.1016/S0022-3093(97)00174-9]
Corni, Federico; Monelli, A; Ottaviani, Giampiero; Tonini, Rita; Queirolo, G; Zanotti, L.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11380/8876
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