Early stages of bubble formation in Czochralski grown, (100)-oriented silicon are investigated by implanting 2 x 10(16) He+ cm(-2) at 20 keV and treating the samples in the temperature range 100-450 degreesC. Elastic recoil detection is used to measure the helium content and depth distribution, while the gas release is studied by thermal desorption spectrometry. To evidence the radiation damage evolution and the defect behavior, the results from Rutherford backscattering spectrometry in channeling conditions, cross sectional transmission electron microscopy, and grazing incidence small angle X-ray scattering are critically analyzed and compared. The study leads to the identification of the steps followed by the defects during annealing and suggests that critical condition for the production of stable bubbles is the presence at low temperature of agglomerates composed of more than four vacancies decorated by helium. This kind of defect offers helium the room necessary to transform into gas phase and confer thermal stability to the bubble embryos.

Early stages of bubble formation in helium-implated (100) silicon / B., Pivac; O., Milat; P., Dubcek; S., Bernstorff; Corni, Federico; Nobili, Carlo Emanuele; Tonini, Rita. - In: PHYSICA STATUS SOLIDI. A, APPLIED RESEARCH. - ISSN 0031-8965. - STAMPA. - 198:1(2003), pp. 29-37. [10.1002/pssa.200306457]

Early stages of bubble formation in helium-implated (100) silicon

CORNI, Federico;NOBILI, Carlo Emanuele;TONINI, Rita
2003

Abstract

Early stages of bubble formation in Czochralski grown, (100)-oriented silicon are investigated by implanting 2 x 10(16) He+ cm(-2) at 20 keV and treating the samples in the temperature range 100-450 degreesC. Elastic recoil detection is used to measure the helium content and depth distribution, while the gas release is studied by thermal desorption spectrometry. To evidence the radiation damage evolution and the defect behavior, the results from Rutherford backscattering spectrometry in channeling conditions, cross sectional transmission electron microscopy, and grazing incidence small angle X-ray scattering are critically analyzed and compared. The study leads to the identification of the steps followed by the defects during annealing and suggests that critical condition for the production of stable bubbles is the presence at low temperature of agglomerates composed of more than four vacancies decorated by helium. This kind of defect offers helium the room necessary to transform into gas phase and confer thermal stability to the bubble embryos.
2003
198
1
29
37
Early stages of bubble formation in helium-implated (100) silicon / B., Pivac; O., Milat; P., Dubcek; S., Bernstorff; Corni, Federico; Nobili, Carlo Emanuele; Tonini, Rita. - In: PHYSICA STATUS SOLIDI. A, APPLIED RESEARCH. - ISSN 0031-8965. - STAMPA. - 198:1(2003), pp. 29-37. [10.1002/pssa.200306457]
B., Pivac; O., Milat; P., Dubcek; S., Bernstorff; Corni, Federico; Nobili, Carlo Emanuele; Tonini, Rita
File in questo prodotto:
Non ci sono file associati a questo prodotto.
Pubblicazioni consigliate

Licenza Creative Commons
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/13553
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 14
  • ???jsp.display-item.citation.isi??? 13
social impact