Rutherford backscattering in channeling in combination with elastic recoil detection analysis has been used to study the formation and destruction of hydrogen supermolecular complexes (H2)n formed in single crystal silicon after hydrogen implantation and annealing in the range 150-800-degrees-C. Secondary ion mass spectroscopy has been used to confirm this interpretation by giving direct evidence for H-2. The supermolecular configuration can be interpreted as the nucleus for the formation of bubbles.
EVIDENCE FOR MOLECULAR-HYDROGEN IN SINGLE-CRYSTAL SILICON / Meda, L; Cerofolini, Gf; Ottaviani, Giampiero; Tonini, Rita; Corni, Federico; Balboni, R; Anderle, M; Canteri, R; Dierckx, R.. - In: PHYSICA. B, CONDENSED MATTER. - ISSN 0921-4526. - STAMPA. - 170:(1991), pp. 259-264.
EVIDENCE FOR MOLECULAR-HYDROGEN IN SINGLE-CRYSTAL SILICON
OTTAVIANI, Giampiero;TONINI, Rita;CORNI, Federico;
1991
Abstract
Rutherford backscattering in channeling in combination with elastic recoil detection analysis has been used to study the formation and destruction of hydrogen supermolecular complexes (H2)n formed in single crystal silicon after hydrogen implantation and annealing in the range 150-800-degrees-C. Secondary ion mass spectroscopy has been used to confirm this interpretation by giving direct evidence for H-2. The supermolecular configuration can be interpreted as the nucleus for the formation of bubbles.
Pubblicazioni consigliate
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris
