A straightforward method for the analysis of channeling RBS spectra is developed and validated. This method needs a minimum of computational complexity and does not require the a priori knowledge of the location of the scattering centres and of their dechanneling cross section. The method is applied to channeling RBS spectra obtained along the [100] direction in a hydrogen-implanted (100) silicon crystal to verify that the evaluated displaced-atom depth distribution is independent of the probe energy.
A fast technique for the quantitative analysis of channeling RBS spectra / Cerofolini, Gf; Corni, Federico; Ottaviani, Giampiero; Tonini, Rita. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS. - ISSN 0168-583X. - STAMPA. - 71:(1992), pp. 441-444. [10.1016/0168-583X(92)95362-U]
A fast technique for the quantitative analysis of channeling RBS spectra
CORNI, Federico;OTTAVIANI, Giampiero;TONINI, Rita
1992
Abstract
A straightforward method for the analysis of channeling RBS spectra is developed and validated. This method needs a minimum of computational complexity and does not require the a priori knowledge of the location of the scattering centres and of their dechanneling cross section. The method is applied to channeling RBS spectra obtained along the [100] direction in a hydrogen-implanted (100) silicon crystal to verify that the evaluated displaced-atom depth distribution is independent of the probe energy.
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