Adjacent structure interactions in latch-up dc triggering of CMOS twin-tub and epitaxial technologies

In this paper a bulk twin-tub and an epitaxial CMOS technology are studied from the viewpoint of latch-up hardness reduction due to interaction between adjacent structures, by means of static triggering measurements performed on "ad hoc" test patterns. The experimental results indicate that such interactions can seriously increase the latch-up susceptibility of the devices under test in the case of the bulk twin-tub process, while the epitaxial one shows in general better stability of the latch-up behavior.