The rate of germanide formation and the composition of the resulting compounds were investigated when thin (100 -250 nm) Pd films, vacuum evaporated onto various Ge substrates, were annealed at 170-270°C for 10 min to 27 h. Both phases Pd2Ge and PdGe were observed on singlecrystal and amorphous (vacuum-deposited) Ge substrates. In all cases the compound layers grow with a (time)1/2 dependence with an activation energy of 1.5 ± 0.1 eV. Moreover, the abserved value of the growth rate depends on the crystalline nature of the Ge substrate. On (111) and (100) substrates the rates are similar, and they are 3 times lower than those on amorphous substrates.

Growth kinetics of palladium germanides Pd2Ge and PdGe on single-crystal and evaporated germanium / Ottaviani, Giampiero; Canali, Claudio; G., Ferrari; R., Ferrari; G., Majni; Prudenziati, Maria; S. S. L. a., U.. - In: THIN SOLID FILMS. - ISSN 0040-6090. - STAMPA. - 47:(1977), pp. 187-194.

Growth kinetics of palladium germanides Pd2Ge and PdGe on single-crystal and evaporated germanium

OTTAVIANI, Giampiero;CANALI, Claudio;PRUDENZIATI, Maria;
1977

Abstract

The rate of germanide formation and the composition of the resulting compounds were investigated when thin (100 -250 nm) Pd films, vacuum evaporated onto various Ge substrates, were annealed at 170-270°C for 10 min to 27 h. Both phases Pd2Ge and PdGe were observed on singlecrystal and amorphous (vacuum-deposited) Ge substrates. In all cases the compound layers grow with a (time)1/2 dependence with an activation energy of 1.5 ± 0.1 eV. Moreover, the abserved value of the growth rate depends on the crystalline nature of the Ge substrate. On (111) and (100) substrates the rates are similar, and they are 3 times lower than those on amorphous substrates.
47
187
194
Growth kinetics of palladium germanides Pd2Ge and PdGe on single-crystal and evaporated germanium / Ottaviani, Giampiero; Canali, Claudio; G., Ferrari; R., Ferrari; G., Majni; Prudenziati, Maria; S. S. L. a., U.. - In: THIN SOLID FILMS. - ISSN 0040-6090. - STAMPA. - 47:(1977), pp. 187-194.
Ottaviani, Giampiero; Canali, Claudio; G., Ferrari; R., Ferrari; G., Majni; Prudenziati, Maria; S. S. L. a., U.
File in questo prodotto:
Non ci sono file associati a questo prodotto.
Pubblicazioni consigliate

Caricamento pubblicazioni consigliate

Licenza Creative Commons
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11380/618497
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 31
  • ???jsp.display-item.citation.isi??? ND
social impact