The performance of multilayer optics depends on the quality of interfaces between spacer and absorber materials. Intermixing at the interfaces affects the optical behavior. An experimental method is presented here to obtain the amount of intermixing at the buried interfaces of multilayer structures. The method is based on the combined use of photoemission and a rocking scan through the Bragg peak. The possibility of obtaining quantitative information - through a phenomenological model - on the width of the intermixing region is presented and discussed.

Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayerProceedings of SPIE / Nicola, Mahne; Angelo, Giglia; Nannarone, Stefano; Juri, Bertoli; Valentina, Mattarello; Valentino, Rigato. - STAMPA. - 6586:(2007), pp. 65860V-65860V+0. ((Intervento presentato al convegno Conference on Damage to VUV, EUV and X-Ray Optics tenutosi a Prague, CZECH REPUBLIC nel APR 18-19, 2007 [10.1117/12.722922].

Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayerProceedings of SPIE

NANNARONE, Stefano;
2007

Abstract

The performance of multilayer optics depends on the quality of interfaces between spacer and absorber materials. Intermixing at the interfaces affects the optical behavior. An experimental method is presented here to obtain the amount of intermixing at the buried interfaces of multilayer structures. The method is based on the combined use of photoemission and a rocking scan through the Bragg peak. The possibility of obtaining quantitative information - through a phenomenological model - on the width of the intermixing region is presented and discussed.
Conference on Damage to VUV, EUV and X-Ray Optics
Prague, CZECH REPUBLIC
APR 18-19, 2007
6586
65860V
65860V+0
Nicola, Mahne; Angelo, Giglia; Nannarone, Stefano; Juri, Bertoli; Valentina, Mattarello; Valentino, Rigato
Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayerProceedings of SPIE / Nicola, Mahne; Angelo, Giglia; Nannarone, Stefano; Juri, Bertoli; Valentina, Mattarello; Valentino, Rigato. - STAMPA. - 6586:(2007), pp. 65860V-65860V+0. ((Intervento presentato al convegno Conference on Damage to VUV, EUV and X-Ray Optics tenutosi a Prague, CZECH REPUBLIC nel APR 18-19, 2007 [10.1117/12.722922].
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11380/743052
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