We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, and then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements, respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45° of grazing incidence and reaches 51.3% upon annealing at 200°C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.
Introduction of Zr in Mg/Co nanometric periodic multilayers / Karine Le, Guen; Min Hui, Hu; Jean Michel, Andre; Philippe, Jonnard; Sika, Zhou; Haochuan, Li; Jingtao, Zhu; Zhanshan, Wang; Nicola, Mahne; Angelo, Giglia; Nannarone, Stefano; Christian, Meny. - STAMPA. - 102:(2010), pp. 799525-799525-5. (Intervento presentato al convegno 7th International Conference on Thin Film Physics and Applications tenutosi a Shanghai, PEOPLES R CHINA nel SEP 24-27, 2010) [10.1117/12.888193].
Introduction of Zr in Mg/Co nanometric periodic multilayers
NANNARONE, Stefano;
2010
Abstract
We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, and then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements, respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45° of grazing incidence and reaches 51.3% upon annealing at 200°C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.
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