The aim of this work is to investigate the distribution of the local current density and temperature gradients along the tests patterns employed for the evaluation of the electromigration phenomena in metal tracks.
Electrical and thermal simulation of local effects for electromigration / Borgarino, Mattia; V., Petrescu; L., Brizzolara; I., De Munari; Fantini, Fausto. - In: SEMICONDUCTOR SCIENCE AND TECHNOLOGY. - ISSN 0268-1242. - STAMPA. - 12:(1997), pp. 1369-1377.
Electrical and thermal simulation of local effects for electromigration
BORGARINO, Mattia;FANTINI, Fausto
1997
Abstract
The aim of this work is to investigate the distribution of the local current density and temperature gradients along the tests patterns employed for the evaluation of the electromigration phenomena in metal tracks.
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