The optical beam induced current (OBIC) technique in a scanning laser microscope enables gate oxide shorts in MOS transistors to be detected and localized, and confirms results of electrical measurements performed on failed devices. The technique is completely non-destructive and can be applied to a large number of MOS gate oxide failures due to breakdown phenomena.
A study of ESD induced effects in high-voltage n-MOS and p-MOS transistors / Pavan, Paolo; E., Zanoni; B., Bonati; S., Martino; G., Dalla Libera. - In: MICROELECTRONICS JOURNAL. - ISSN 0959-8324. - STAMPA. - 23:(1992), pp. 45-50.