This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.
AlN-based MEMS devices for vibrational energy harvesting applications / Bertacchini, Alessandro; Scorcioni, Stefano; Dondi, Denis; Larcher, Luca; Pavan, Paolo; M. T., Todaro; A., Campa; G., Caretto; S., Petroni; A., Passaseo; M., De Vittorio. - STAMPA. - (2011), pp. 119-122. (Intervento presentato al convegno 41st European Solid-State Device Research Conference, ESSDERC 2011 tenutosi a Helsinki, fin nel September, 12-16, 2011) [10.1109/ESSDERC.2011.6044220].
AlN-based MEMS devices for vibrational energy harvesting applications
BERTACCHINI, Alessandro;SCORCIONI, Stefano;DONDI, Denis;LARCHER, Luca;PAVAN, Paolo;
2011
Abstract
This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.
| File | Dimensione | Formato | |
|---|---|---|---|
|
ESSDERC11.pdf
Accesso riservato
Tipologia:
Versione pubblicata dall'editore
Dimensione
617.67 kB
Formato
Adobe PDF
|
617.67 kB | Adobe PDF | Visualizza/Apri Richiedi una copia |
|
ESSDERC_2011_Camera Ready.pdf
Accesso riservato
Tipologia:
Versione dell'autore revisionata e accettata per la pubblicazione
Dimensione
576.43 kB
Formato
Adobe PDF
|
576.43 kB | Adobe PDF | Visualizza/Apri Richiedi una copia |
Pubblicazioni consigliate
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris
