This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.

AlN-based MEMS devices for vibrational energy harvesting applications / Bertacchini, Alessandro; Scorcioni, Stefano; Dondi, Denis; Larcher, Luca; Pavan, Paolo; M. T., Todaro; A., Campa; G., Caretto; S., Petroni; A., Passaseo; M., De Vittorio. - STAMPA. - (2011), pp. 119-122. ((Intervento presentato al convegno 41st European Solid-State Device Research Conference, ESSDERC 2011 tenutosi a Helsinki, fin nel September, 12-16, 2011 [10.1109/ESSDERC.2011.6044220].

AlN-based MEMS devices for vibrational energy harvesting applications

BERTACCHINI, Alessandro;SCORCIONI, Stefano;DONDI, Denis;LARCHER, Luca;PAVAN, Paolo;
2011

Abstract

This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.
41st European Solid-State Device Research Conference, ESSDERC 2011
Helsinki, fin
September, 12-16, 2011
119
122
Bertacchini, Alessandro; Scorcioni, Stefano; Dondi, Denis; Larcher, Luca; Pavan, Paolo; M. T., Todaro; A., Campa; G., Caretto; S., Petroni; A., Passaseo; M., De Vittorio
AlN-based MEMS devices for vibrational energy harvesting applications / Bertacchini, Alessandro; Scorcioni, Stefano; Dondi, Denis; Larcher, Luca; Pavan, Paolo; M. T., Todaro; A., Campa; G., Caretto; S., Petroni; A., Passaseo; M., De Vittorio. - STAMPA. - (2011), pp. 119-122. ((Intervento presentato al convegno 41st European Solid-State Device Research Conference, ESSDERC 2011 tenutosi a Helsinki, fin nel September, 12-16, 2011 [10.1109/ESSDERC.2011.6044220].
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11380/683849
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