We describe the development of N-polar GaN-based high electron mobility transistors grown by N2 plasma-assisted molecular beam epitaxy on C-face SiC substrates. High mobility AlGaN/GaN modulation-doped two-dimensional electron gas channels were grown, and transistors with excellent dc and small-signal performance were fabricated on these wafers. Large-signal dispersion was observed, and the trap states responsible for this were identified, and layer designs to remove the dispersive effects of these traps were demonstrated. Finally, an AlGaN-cap layer was used to reduce gate leakage in these devices, and a low-dispersion high breakdown voltage device was achieved. This detailed study of dispersion and leakage in N-polar GaN-based transistors establishes a technological base for further development of field effect devices based on N-polar III-nitrides.

N-polar GaN/AlGaN/GaN high electron mobility transistors / Rajan, S.; Chini, Alessandro; Wong, M. H.; Speck, J. S.; Mishra, U. K.. - In: JOURNAL OF APPLIED PHYSICS. - ISSN 0021-8979. - STAMPA. - 102(4)(2007), pp. 044501-1-044501-6. [10.1063/1.2769950]

N-polar GaN/AlGaN/GaN high electron mobility transistors

CHINI, Alessandro;
2007

Abstract

We describe the development of N-polar GaN-based high electron mobility transistors grown by N2 plasma-assisted molecular beam epitaxy on C-face SiC substrates. High mobility AlGaN/GaN modulation-doped two-dimensional electron gas channels were grown, and transistors with excellent dc and small-signal performance were fabricated on these wafers. Large-signal dispersion was observed, and the trap states responsible for this were identified, and layer designs to remove the dispersive effects of these traps were demonstrated. Finally, an AlGaN-cap layer was used to reduce gate leakage in these devices, and a low-dispersion high breakdown voltage device was achieved. This detailed study of dispersion and leakage in N-polar GaN-based transistors establishes a technological base for further development of field effect devices based on N-polar III-nitrides.
102(4)
044501-1
044501-6
N-polar GaN/AlGaN/GaN high electron mobility transistors / Rajan, S.; Chini, Alessandro; Wong, M. H.; Speck, J. S.; Mishra, U. K.. - In: JOURNAL OF APPLIED PHYSICS. - ISSN 0021-8979. - STAMPA. - 102(4)(2007), pp. 044501-1-044501-6. [10.1063/1.2769950]
Rajan, S.; Chini, Alessandro; Wong, M. H.; Speck, J. S.; Mishra, U. K.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11380/583832
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