The thermo-mechanical behaviour of different bulk-micromachined microheater structures for chemoresistive gas sensors is investigated by means of 3D finite element simulation. Si3N4-SiO2-Si3N4 and SiO2-Si3N4-SiO2 stacked membranes are compared in terms of heat confinement and mechanical properties. The mechanical behaviour of the membrane and of two different suspended-bridge structures under applied external load is analysed. The present study served as a basis for the development of a microheater which hase shown excellent heating efficiency characteristics.
Thermo-mechanical analysis of microstructures for chemoresistive gas sensors / D., Giusti; Verzellesi, Giovanni; G. U., Pignatel. - STAMPA. - (1999), pp. 366-370. (Intervento presentato al convegno International Workshop on Thermal Investigations of ICs and Microstructures (THERMINIC) tenutosi a Roma (Italy) nel Oct. 1999).
Thermo-mechanical analysis of microstructures for chemoresistive gas sensors
VERZELLESI, Giovanni;
1999
Abstract
The thermo-mechanical behaviour of different bulk-micromachined microheater structures for chemoresistive gas sensors is investigated by means of 3D finite element simulation. Si3N4-SiO2-Si3N4 and SiO2-Si3N4-SiO2 stacked membranes are compared in terms of heat confinement and mechanical properties. The mechanical behaviour of the membrane and of two different suspended-bridge structures under applied external load is analysed. The present study served as a basis for the development of a microheater which hase shown excellent heating efficiency characteristics.
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