We report on the design, fabrication, and characterization of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.
We report on the design, fabrication, and characterisation of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.
Development of silicon microheaters for chemoresistive gas sensors / S., B., L., F., F., G., D., G., V., G., B., M., G. U., P., G., S., A., V., Verzellesi, G., M., Z.. - STAMPA. - 3680:(1999), pp. 964-968. (Conference on Design, Test, and Microfabrication of MEMS and MOEMS PARIS, FRANCE MAR 30-APR 01, 1999) [10.1117/12.341164].
Development of silicon microheaters for chemoresistive gas sensors
VERZELLESI, Giovanni;
1999
Abstract
We report on the design, fabrication, and characterisation of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.
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