We report on the design, fabrication, and characterization of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.

We report on the design, fabrication, and characterisation of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.

Development of silicon microheaters for chemoresistive gas sensors / S., Brida; L., Ferrario; F., Giacomozzi; D., Giusti; V., Guarnieri; B., Margesin; G. U., Pignatel; G., Soncini; A., Vasiliev; Verzellesi, Giovanni; M., Zen. - STAMPA. - 3680(1999), pp. 964-968. ((Intervento presentato al convegno Conference on Design, Test, and Microfabrication of MEMS and MOEMS tenutosi a PARIS, FRANCE nel MAR 30-APR 01, 1999 [10.1117/12.341164].

Development of silicon microheaters for chemoresistive gas sensors

VERZELLESI, Giovanni;
1999

Abstract

We report on the design, fabrication, and characterization of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.
Conference on Design, Test, and Microfabrication of MEMS and MOEMS
PARIS, FRANCE
MAR 30-APR 01, 1999
3680
964
968
S., Brida; L., Ferrario; F., Giacomozzi; D., Giusti; V., Guarnieri; B., Margesin; G. U., Pignatel; G., Soncini; A., Vasiliev; Verzellesi, Giovanni; M., Zen
Development of silicon microheaters for chemoresistive gas sensors / S., Brida; L., Ferrario; F., Giacomozzi; D., Giusti; V., Guarnieri; B., Margesin; G. U., Pignatel; G., Soncini; A., Vasiliev; Verzellesi, Giovanni; M., Zen. - STAMPA. - 3680(1999), pp. 964-968. ((Intervento presentato al convegno Conference on Design, Test, and Microfabrication of MEMS and MOEMS tenutosi a PARIS, FRANCE nel MAR 30-APR 01, 1999 [10.1117/12.341164].
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11380/467011
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