The authors present a transmission electron microscopy characterization and sculpting of freestanding Si-O-C nanowires, fabricated by electron beam induced deposition from a tetraethylorthosilicate precursor, in a dual beam system. Electron energy loss spectroscopy and near edge structure analyses performed on as deposited wires show the formation of amorphous silicon dioxide with extra oxygen and carbon content. Subsequent electron beam sculpting by 200 keV transmission electron microscope irradiation decreases carbon and oxygen contents leaving the silicon oxidation state unchanged and narrows Si-O-C wire width to less than 1 nm. (c) 2006 American Institute of Physics.

Transmission Electron Microscopy characterization and sculpting of sub-1 nm Si-O-C freestanding nanowires grown by electron beam induced deposition / Frabboni, Stefano; G. C., Gazzadi; A., Spessot. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - STAMPA. - 89:(2006), pp. 113108-1-113108-3.

Transmission Electron Microscopy characterization and sculpting of sub-1 nm Si-O-C freestanding nanowires grown by electron beam induced deposition

FRABBONI, Stefano;
2006

Abstract

The authors present a transmission electron microscopy characterization and sculpting of freestanding Si-O-C nanowires, fabricated by electron beam induced deposition from a tetraethylorthosilicate precursor, in a dual beam system. Electron energy loss spectroscopy and near edge structure analyses performed on as deposited wires show the formation of amorphous silicon dioxide with extra oxygen and carbon content. Subsequent electron beam sculpting by 200 keV transmission electron microscope irradiation decreases carbon and oxygen contents leaving the silicon oxidation state unchanged and narrows Si-O-C wire width to less than 1 nm. (c) 2006 American Institute of Physics.
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113108-1
113108-3
Transmission Electron Microscopy characterization and sculpting of sub-1 nm Si-O-C freestanding nanowires grown by electron beam induced deposition / Frabboni, Stefano; G. C., Gazzadi; A., Spessot. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - STAMPA. - 89:(2006), pp. 113108-1-113108-3.
Frabboni, Stefano; G. C., Gazzadi; A., Spessot
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11380/451877
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