A new high resolution resistometric measurement technique has been developed in order to perform accurate early resistance change measurements on metal lines submitted to high current densities.
The thermally balanced bridge technique (TBBT): a new high resolution resistometric measurement technique for the study of electromigration-induced early resistance changes in metal stripes / J., VAN OLMEN; W., DE CEUNINCK; L., DE SCHEPPER; A., Goldoni; A., Cervini; Fantini, Fausto. - In: MICROELECTRONICS RELIABILITY. - ISSN 0026-2714. - STAMPA. - 37:(1997), pp. 1483-1486.
The thermally balanced bridge technique (TBBT): a new high resolution resistometric measurement technique for the study of electromigration-induced early resistance changes in metal stripes
FANTINI, Fausto
1997
Abstract
A new high resolution resistometric measurement technique has been developed in order to perform accurate early resistance change measurements on metal lines submitted to high current densities.
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