Using isotropic elasticity theory it is possible to determine the bulk mismatch in thinned, cross-sectioned heterostructures, where a relaxation occurs along the thinning direction. This is accomplished by measuring, in the central disk of a single Convergent Beam Electron Diffraction (CBED) pattern, the position of the High Order Laue Zone lines, which are sensitive to lattice parameters along different crystallographic directions. The results obtained in both uniform and graded Si1-xGex/Si heterostructures are in good agreement with bulk values deduced from independent techniques.
Determination of bulk mismatch values in heterostructures by TEM/CBED / Armigliato, A.; Balboni, R.; Frabboni, S.. - In: MATERIALS RESEARCH SOCIETY SYMPOSIA PROCEEDINGS. - ISSN 0272-9172. - 405:(1996), pp. 467-472. ( Proceedings of the 1995 MRS Fall Meeting Boston, MA, USA, 1995).
Determination of bulk mismatch values in heterostructures by TEM/CBED
Frabboni S.
1996
Abstract
Using isotropic elasticity theory it is possible to determine the bulk mismatch in thinned, cross-sectioned heterostructures, where a relaxation occurs along the thinning direction. This is accomplished by measuring, in the central disk of a single Convergent Beam Electron Diffraction (CBED) pattern, the position of the High Order Laue Zone lines, which are sensitive to lattice parameters along different crystallographic directions. The results obtained in both uniform and graded Si1-xGex/Si heterostructures are in good agreement with bulk values deduced from independent techniques.
Pubblicazioni consigliate
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris
