Using isotropic elasticity theory it is possible to determine the bulk mismatch in thinned, cross-sectioned heterostructures, where a relaxation occurs along the thinning direction. This is accomplished by measuring, in the central disk of a single Convergent Beam Electron Diffraction (CBED) pattern, the position of the High Order Laue Zone lines, which are sensitive to lattice parameters along different crystallographic directions. The results obtained in both uniform and graded Si1-xGex/Si heterostructures are in good agreement with bulk values deduced from independent techniques.
Determination of bulk mismatch values in heterostructures by TEM/CBED / Armigliato, A.; Balboni, R.; Frabboni, S.. - In: MATERIALS RESEARCH SOCIETY SYMPOSIA PROCEEDINGS. - ISSN 0272-9172. - 405:(1996), pp. 467-472. (Intervento presentato al convegno Proceedings of the 1995 MRS Fall Meeting tenutosi a Boston, MA, USA, nel 1995).
Determination of bulk mismatch values in heterostructures by TEM/CBED
Frabboni S.
1996
Abstract
Using isotropic elasticity theory it is possible to determine the bulk mismatch in thinned, cross-sectioned heterostructures, where a relaxation occurs along the thinning direction. This is accomplished by measuring, in the central disk of a single Convergent Beam Electron Diffraction (CBED) pattern, the position of the High Order Laue Zone lines, which are sensitive to lattice parameters along different crystallographic directions. The results obtained in both uniform and graded Si1-xGex/Si heterostructures are in good agreement with bulk values deduced from independent techniques.
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