In this work, we exploit the general-purpose solver COMSOL, equipped with electrolyte and semiconductor physics modules, to implement a versatile model of potentiometric chemical sensors including arbitrarily complex surface reactions at the oxide/electrolyte interface with examples on 2D devicelevel simulations of an ISFET. Firstly, Multiphysics simulations of VTH sensitivity to pH sensing are compared with analyses based on semiconductor TCAD. Then, more complex Na+ sensing experiments are examined and numerical simulations are compared against 1D electrochemical models.
Device simulations of ion-sensitive FETs with arbitrary surface chemical reactions / Mele, L. J.; Palestri, P.; Selmi, L.. - (2021), pp. 1-4. (Intervento presentato al convegno 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EuroSOI-ULIS 2021 tenutosi a fra nel 2021) [10.1109/EuroSOI-ULIS53016.2021.9560696].
Device simulations of ion-sensitive FETs with arbitrary surface chemical reactions
Palestri P.;Selmi L.
2021
Abstract
In this work, we exploit the general-purpose solver COMSOL, equipped with electrolyte and semiconductor physics modules, to implement a versatile model of potentiometric chemical sensors including arbitrarily complex surface reactions at the oxide/electrolyte interface with examples on 2D devicelevel simulations of an ISFET. Firstly, Multiphysics simulations of VTH sensitivity to pH sensing are compared with analyses based on semiconductor TCAD. Then, more complex Na+ sensing experiments are examined and numerical simulations are compared against 1D electrochemical models.
Pubblicazioni consigliate
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris
