In this paper, we address the increasingly important and rapidly developing field of ISFET-based silicon integrated biochemical sensors. ISFET transduction mechanism, modelling and electrochemical characterization techniques are reviewed. ISFET fabrication technology, mainly with reference to the ISFET-CMOS process developed at IRST, is described. Two examples of ISFET-based systems for application in the environmental monitoring field are presented.
Chemical sensors based on ISFET transducers / Lui, A.; Margesin, B.; Zen, M.; Soncini, G.; Verzellesi, G.. - In: INFORMACIJE MIDEM. - ISSN 0352-9045. - 26:4(1996), pp. 238-250.
Chemical sensors based on ISFET transducers
Verzellesi G.
1996
Abstract
In this paper, we address the increasingly important and rapidly developing field of ISFET-based silicon integrated biochemical sensors. ISFET transduction mechanism, modelling and electrochemical characterization techniques are reviewed. ISFET fabrication technology, mainly with reference to the ISFET-CMOS process developed at IRST, is described. Two examples of ISFET-based systems for application in the environmental monitoring field are presented.
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