By means of focused ion beam milling, we fabricate Hall magnetometers with active areas as small as 100 × 100 nm2. The constituent material can either be metallic (Au), semimetallic (Bi) or doped bulk semiconducting (Si doped GaAs). We experimentally show that Au nano-probes can work from room temperature down to liquid helium with magnetic flux sensitivity < 10- 1 Φ0. © 2006 Elsevier B.V. All rights reserved.
Focused ion beam patterned Hall nano-sensors / Candini, A.; Gazzadi, G. C.; di Bona, A.; Affronte, M.; Ercolani, D.; Biasiol, G.; Sorba, L.. - In: JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS. - ISSN 0304-8853. - 310:2(2007), pp. 2752-2754. [10.1016/j.jmmm.2006.10.1036]
Focused ion beam patterned Hall nano-sensors
Candini A.;Gazzadi G. C.;di Bona A.;Affronte M.;Ercolani D.;Sorba L.
2007
Abstract
By means of focused ion beam milling, we fabricate Hall magnetometers with active areas as small as 100 × 100 nm2. The constituent material can either be metallic (Au), semimetallic (Bi) or doped bulk semiconducting (Si doped GaAs). We experimentally show that Au nano-probes can work from room temperature down to liquid helium with magnetic flux sensitivity < 10- 1 Φ0. © 2006 Elsevier B.V. All rights reserved.
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