The signal-to-noise ratio of planar ISFET pH sensors deteriorates when reducing the area occupied by the device, thus hampering the scalability of on-chip analytical systems which detect the DNA polymerase through pH measurements. Top-down nano-sized tri-gate transistors, such as silicon nanowires, are designed for high performance solid-state circuits thanks to their superior properties of voltage-to-current transduction, which can be advantageously exploited for pH sensing. A systematic study is carried out on rectangular-shaped nanowires developed in a complementary metal-oxide-semiconductor (CMOS)-compatible technology, showing that reducing the width of the devices below a few hundreds of nanometers leads to higher charge sensitivity. Moreover, devices composed of several wires in parallel further increase the exposed surface per unit footprint area, thus maximizing the signal-to-noise ratio. This technology allows a sub milli-pH unit resolution with a sensor footprint of about 1 µm2, exceeding the performance of previously reported studies on silicon nanowires by two orders of magnitude.
The signal-to-noise ratio of planar ISFET pH sensors deteriorates when reducing the area occupied by the device, thus hampering the scalability of on-chip analytical systems which detect the DNA polymerase through pH measurements. Top-down nano-sized tri-gate transistors, such as silicon nanowires, are designed for high performance solid-state circuits thanks to their superior properties of voltage-to-current transduction, which can be advantageously exploited for pH sensing. A systematic study is carried out on rectangular-shaped nanowires developed in a complementary metal-oxide-semiconductor (CMOS)-compatible technology, showing that reducing the width of the devices below a few hundreds of nanometers leads to higher charge sensitivity. Moreover, devices composed of several wires in parallel further increase the exposed surface per unit footprint area, thus maximizing the signal-to-noise ratio. This technology allows a sub milli-pH unit resolution with a sensor footprint of about 1 μm2, exceeding the performance of previously reported studies on silicon nanowires by two orders of magnitude.
Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint / Accastelli, Enrico; SCARBOLO, Paolo; Ernst, Thomas; PALESTRI, Pierpaolo; SELMI, Luca; Guiducci, Carlotta. - In: BIOSENSORS. - ISSN 2079-6374. - ELETTRONICO. - 6:1(2016), pp. N/A-N/A.
Data di pubblicazione: | 2016 |
Titolo: | Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint |
Autore/i: | Accastelli, Enrico; SCARBOLO, Paolo; Ernst, Thomas; PALESTRI, Pierpaolo; SELMI, Luca; Guiducci, Carlotta |
Autore/i UNIMORE: | |
Digital Object Identifier (DOI): | http://dx.doi.org/10.3390/bios6010009 |
Rivista: | |
Volume: | 6 |
Fascicolo: | 1 |
Pagina iniziale: | N/A |
Pagina finale: | N/A |
Codice identificativo ISI: | WOS:000373371300008 |
Codice identificativo Scopus: | 2-s2.0-84962273056 |
Codice identificativo Pubmed: | 26999232 |
Citazione: | Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint / Accastelli, Enrico; SCARBOLO, Paolo; Ernst, Thomas; PALESTRI, Pierpaolo; SELMI, Luca; Guiducci, Carlotta. - In: BIOSENSORS. - ISSN 2079-6374. - ELETTRONICO. - 6:1(2016), pp. N/A-N/A. |
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