A study was carried out on the relationship between the composition, poling condition and piezoelectric properties of thick-film layers. Pastes based on lead-titatnate zirconate (PZT) powders, with either Pbo or a lead-alumina -silicate glass frit as binder, were prepared . Microstructure, electrical and mechanical properties were analysed. processing and polig conditions modify these properties; then a wide latitude of opportunities is offered in the choice of ferroelectric/piezoelectric characteristics of the layers used as sensing elements for sensors. A pressure sensor was realised where a circular diaphragm of alumina supports two piezoelectric layers obtained by screen printing and firing a PZT/PbO-based ferroelectric paste. The design and performance characteristics are described.
PZT-based thick films and the development of a piezoelectric pressure sensor / Morten, Bruno; G., De Cicco; A., Gandolfi; C., Tonelli. - In: MICROELECTRONICS INTERNATIONAL. - ISSN 1356-5362. - STAMPA. - 9:(1992), pp. 25-28.
PZT-based thick films and the development of a piezoelectric pressure sensor
MORTEN, Bruno;
1992
Abstract
A study was carried out on the relationship between the composition, poling condition and piezoelectric properties of thick-film layers. Pastes based on lead-titatnate zirconate (PZT) powders, with either Pbo or a lead-alumina -silicate glass frit as binder, were prepared . Microstructure, electrical and mechanical properties were analysed. processing and polig conditions modify these properties; then a wide latitude of opportunities is offered in the choice of ferroelectric/piezoelectric characteristics of the layers used as sensing elements for sensors. A pressure sensor was realised where a circular diaphragm of alumina supports two piezoelectric layers obtained by screen printing and firing a PZT/PbO-based ferroelectric paste. The design and performance characteristics are described.
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