In this work results are presented regarding measurements on silicon diaphragms with piezoresitive diffused layers subjected to a differential pressure. The geometric feature allows the simultaneous calculation of the fundamental piezoresivity coefficients,
Piezoresistive effect in silicon diffused layers / F., Conti; Morten, Bruno; C., Nobili; A., Taroni. - In: PHYSICA STATUS SOLIDI. A, APPLIED RESEARCH. - ISSN 0031-8965. - STAMPA. - 17:(1973), pp. K29-K31. [10.1002/passa.2210170147]
Piezoresistive effect in silicon diffused layers
MORTEN, Bruno;
1973
Abstract
In this work results are presented regarding measurements on silicon diaphragms with piezoresitive diffused layers subjected to a differential pressure. The geometric feature allows the simultaneous calculation of the fundamental piezoresivity coefficients,
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