Hall magnetometers with active areas down to 100 x 100 nm(2) were fabricated patterning gold and Si-doped GaAs films by focused ion beam. For GaAs probes, electrical characterization shows that the magnetic flux sensitivity is better than 10(-2)Phi(0) at room temperature. Hall nano-probes made of gold can work down to liquid helium temperature with magnetic flux sensitivity 10(-1)Phi(0).
Hall nano-probes fabricated by focused ion beam / A., Candini; Cg, Gazzadi; A., Di Bona; Affronte, Marco; D., Ercolani; G., Biasiol; Sorba, Lucia. - In: NANOTECHNOLOGY. - ISSN 0957-4484. - STAMPA. - 17:9(2006), pp. 2105-2109. [10.1088/0957-4484/17/9/005]