Nanomachining and beam-assisted Pt deposition by a focused ion beam (FIB) was used to modify AFM probes for improved electric force measurements.. Si3N4 cantilevers have been endowed with a nano-electrode at the tip apex to confine the electro-sensitive area at the very tip. This action results in both a marked decrease of the parasitic capacitive effect and in an improved electric force microscopy (EFM) contrast and resolution, with respect to usual, full metal-coated cantilevers. This fabrication approach is suited to the development of innovative electro-sensitive probes, useful in different scanning probe techniques.

Focused ion beam-nanomachined probes for improved electric force microscopy / C., Menozzi; Gazzadi, G. C.; Alessandrini, Andrea; P., Facci. - In: ULTRAMICROSCOPY. - ISSN 0304-3991. - STAMPA. - 104:3-4(2005), pp. 220-225. [10.1016/j.ultramic.2005.04.004]

Focused ion beam-nanomachined probes for improved electric force microscopy

ALESSANDRINI, Andrea;
2005

Abstract

Nanomachining and beam-assisted Pt deposition by a focused ion beam (FIB) was used to modify AFM probes for improved electric force measurements.. Si3N4 cantilevers have been endowed with a nano-electrode at the tip apex to confine the electro-sensitive area at the very tip. This action results in both a marked decrease of the parasitic capacitive effect and in an improved electric force microscopy (EFM) contrast and resolution, with respect to usual, full metal-coated cantilevers. This fabrication approach is suited to the development of innovative electro-sensitive probes, useful in different scanning probe techniques.
2005
104
3-4
220
225
Focused ion beam-nanomachined probes for improved electric force microscopy / C., Menozzi; Gazzadi, G. C.; Alessandrini, Andrea; P., Facci. - In: ULTRAMICROSCOPY. - ISSN 0304-3991. - STAMPA. - 104:3-4(2005), pp. 220-225. [10.1016/j.ultramic.2005.04.004]
C., Menozzi; Gazzadi, G. C.; Alessandrini, Andrea; P., Facci
File in questo prodotto:
Non ci sono file associati a questo prodotto.
Pubblicazioni consigliate

Licenza Creative Commons
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/612017
Citazioni
  • ???jsp.display-item.citation.pmc??? 2
  • Scopus 24
  • ???jsp.display-item.citation.isi??? 23
social impact