Abstract The aim of the work is to design a new compact microwave plasma source with a homogeneous circumferential distribution of the electric field intensity. The software for electromagnetic field simulation combined with design-of-experiments techniques was used to design and optimize the source geometry in terms of energy efficiency and field homogeneity. The basic assumption is that plasma can be described by an equivalent dielectric load. Two relatively simple microwave waveguide plasma sources have been simulated to study the effect of impedance-matching devices on the energy efficiency of the whole system. A microwave waveguide plasma source based on the WR340 waveguide geometry has been assembled to validate the model experimentally. A completely new compact plasma source, which is a toroidal waveguide and an innovative 'self-adapting' coupling slot, has been numerically simulated, designed and built. Preliminary tests confirmed the existence of a sufficiently homogeneous five-lobe distribution of the electric field.

The design and optimization of a new microwave plasma source by numerical simulation / Veronesi, Paolo; Leonelli, Cristina; Poli, Giorgio; M., Garuti. - In: PLASMA DEVICES AND OPERATIONS. - ISSN 1051-9998. - STAMPA. - 15 (1):(2007), pp. 13-26.

The design and optimization of a new microwave plasma source by numerical simulation

VERONESI, Paolo;LEONELLI, Cristina;POLI, Giorgio;
2007-01-01

Abstract

Abstract The aim of the work is to design a new compact microwave plasma source with a homogeneous circumferential distribution of the electric field intensity. The software for electromagnetic field simulation combined with design-of-experiments techniques was used to design and optimize the source geometry in terms of energy efficiency and field homogeneity. The basic assumption is that plasma can be described by an equivalent dielectric load. Two relatively simple microwave waveguide plasma sources have been simulated to study the effect of impedance-matching devices on the energy efficiency of the whole system. A microwave waveguide plasma source based on the WR340 waveguide geometry has been assembled to validate the model experimentally. A completely new compact plasma source, which is a toroidal waveguide and an innovative 'self-adapting' coupling slot, has been numerically simulated, designed and built. Preliminary tests confirmed the existence of a sufficiently homogeneous five-lobe distribution of the electric field.
15 (1)
13
26
The design and optimization of a new microwave plasma source by numerical simulation / Veronesi, Paolo; Leonelli, Cristina; Poli, Giorgio; M., Garuti. - In: PLASMA DEVICES AND OPERATIONS. - ISSN 1051-9998. - STAMPA. - 15 (1):(2007), pp. 13-26.
Veronesi, Paolo; Leonelli, Cristina; Poli, Giorgio; M., Garuti
File in questo prodotto:
Non ci sono file associati a questo prodotto.
Pubblicazioni consigliate

Licenza Creative Commons
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/309746
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 3
  • ???jsp.display-item.citation.isi??? 2
social impact