High Quality MoS 2 Layered Thin Films Obtained by Ionized Jet Deposition Investigated by X‐ray Absorption Spectroscopy at S L 2,3 and Mo M 2,3 Edges

We present a comparative soft x-ray absorption spectroscopy (XAS) study of the sulfur L2,3 and molybdenum M2,3 absorption edges in MoS2 prepared by different fabrication routes, including bulk crystallization, mechanical exfoliation, chemical vapor deposition(CVD),andionizedjetdeposition(IJD).TheSL2,3 edgesrevealpronounceddifferencesinpre-edgeandmain-edgefine structurethatsensitivelyreflectthedegreeofstructuralorder,dimensionality,andelectronichybridizationbetweenS3pandMo 4dstates.Bulk,exfoliated,andCVD-grownsamplesexhibitwell-resolvedmultiplefeaturescharacteristicoflayeredandordered two-dimensional(2D)MoS2,whereasas-depositedIJD-grownfilmsdisplaybroadened,weaklystructuredspectraconsistentwith anamorphousphaseandpoorlydefinedstoichiometry.Uponmoderateannealingat250◦C,IJD-grownfilmsdevelopclearspectral signaturesoflayeredMoS2,indicatingtheformationofanorderedcrystalline2H-MoS2 phase.ComplementaryanalysisoftheMo M2,3 edges shows a concomitant narrowing and energy shift of the M3 feature toward values typical of well-ordered 2D MoS2. TheseresultsdemonstratethatSL2,3 andMoM2,3 XASprovideasensitiveprobeofsynthesis-dependentelectronicstructurein MoS2 andconfirmIJDasaviable,low-temperatureroutetoelectronicallyordered2DMoS2 phases.