A systematic study on charging of carbon thin films under intense electron-beam irradiation was performed in a transmission electron microscope to identify the underlying physics for the functionality of hole-free phase plates. Thin amorphous carbon films fabricated by different deposition techniques and single-layer graphene were studied. Clean thin films at moderate temperatures show small negative charging while thin films kept at an elevated temperature are stable and not prone to beam-generated charging. The charging is attributed to electron-stimulated desorption (ESD) of chemisorbed water molecules from the thin-film surfaces and an accompanying change of work function. The ESD interpretation is supported by experimental results obtained by electron-energy loss spectroscopy, hole-free phase plate imaging, secondary electron detection and x-ray photoelectron spectroscopy as well as simulations of the electrostatic potential distribution. The described ESD-based model explains previous experimental findings and is of general interest to any phase-related technique in a transmission electron microscope.

Charging of carbon thin films in scanning and phase-plate transmission electron microscopy / Hettler, S.; Kano, E.; Dries, M.; Gerthsen, D.; Pfaffmann, L.; Bruns, M.; Beleggia, M.; Malac, M.. - In: ULTRAMICROSCOPY. - ISSN 0304-3991. - 184:(2018), pp. 252-266. [10.1016/j.ultramic.2017.09.009]

Charging of carbon thin films in scanning and phase-plate transmission electron microscopy

Beleggia M.;
2018

Abstract

A systematic study on charging of carbon thin films under intense electron-beam irradiation was performed in a transmission electron microscope to identify the underlying physics for the functionality of hole-free phase plates. Thin amorphous carbon films fabricated by different deposition techniques and single-layer graphene were studied. Clean thin films at moderate temperatures show small negative charging while thin films kept at an elevated temperature are stable and not prone to beam-generated charging. The charging is attributed to electron-stimulated desorption (ESD) of chemisorbed water molecules from the thin-film surfaces and an accompanying change of work function. The ESD interpretation is supported by experimental results obtained by electron-energy loss spectroscopy, hole-free phase plate imaging, secondary electron detection and x-ray photoelectron spectroscopy as well as simulations of the electrostatic potential distribution. The described ESD-based model explains previous experimental findings and is of general interest to any phase-related technique in a transmission electron microscope.
2018
184
252
266
Charging of carbon thin films in scanning and phase-plate transmission electron microscopy / Hettler, S.; Kano, E.; Dries, M.; Gerthsen, D.; Pfaffmann, L.; Bruns, M.; Beleggia, M.; Malac, M.. - In: ULTRAMICROSCOPY. - ISSN 0304-3991. - 184:(2018), pp. 252-266. [10.1016/j.ultramic.2017.09.009]
Hettler, S.; Kano, E.; Dries, M.; Gerthsen, D.; Pfaffmann, L.; Bruns, M.; Beleggia, M.; Malac, M.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/1270667
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