HEMT transistor (50; 100; 150) having a semiconductor body (52) forming a semiconductive heterostructure (54, 56); a gate region (60), of conductive material, arranged above and in contact with the semiconductor body (52); a first insulating layer (58) extending above the semiconductor body, laterally to the conductive gate region (60); a second insulating layer (62) extending above the first insulating layer (58) and the gate region (60); a first field plate region (84), of conductive material, extending between the first and the second insulating layers (58), laterally spaced from the conductive gate region (60); and a second field plate region (85), of conductive material, extending above the second insulating layer (62), vertically aligned with the first field plate region (84).
Hemt transistor including field plate regions and manufacturing process thereof / Iucolano, Ferdinando; Chini, Alessandro. - (2020 Dec 02).
Hemt transistor including field plate regions and manufacturing process thereof
Alessandro Chini
2020
Abstract
HEMT transistor (50; 100; 150) having a semiconductor body (52) forming a semiconductive heterostructure (54, 56); a gate region (60), of conductive material, arranged above and in contact with the semiconductor body (52); a first insulating layer (58) extending above the semiconductor body, laterally to the conductive gate region (60); a second insulating layer (62) extending above the first insulating layer (58) and the gate region (60); a first field plate region (84), of conductive material, extending between the first and the second insulating layers (58), laterally spaced from the conductive gate region (60); and a second field plate region (85), of conductive material, extending above the second insulating layer (62), vertically aligned with the first field plate region (84).File | Dimensione | Formato | |
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