A test structure employing a one-step lithography process has been built for measuring the complex impedance of ferroelectric capacitors at microwaves. The measurements are compared to the results of a finite element analysis with the aim of developing an electrical model of the test structure in which parasitic elements appear. These elements can be experimentally measured and partially de-embedded. The purpose of this paper is the characterization of strontium-bismuth tantalate (SBT) capacitors for microwave ICs or SoCs.

Test pattern for microwave dielectric properties of SrBi2Ta2O9 / Delmonte, N.; Watts, B. E.; Rosa, L.; Chiorboli, G.; Cova, P.; Menozzi, R.. - I:(2005), pp. 195-198. (Intervento presentato al convegno 2005 PhD Research in Microelectronics and Electronics Conference tenutosi a Lausanne, che nel 2005) [10.1109/RME.2005.1543044].

Test pattern for microwave dielectric properties of SrBi2Ta2O9

Rosa L.;
2005

Abstract

A test structure employing a one-step lithography process has been built for measuring the complex impedance of ferroelectric capacitors at microwaves. The measurements are compared to the results of a finite element analysis with the aim of developing an electrical model of the test structure in which parasitic elements appear. These elements can be experimentally measured and partially de-embedded. The purpose of this paper is the characterization of strontium-bismuth tantalate (SBT) capacitors for microwave ICs or SoCs.
2005
28-lug-2005
2005 PhD Research in Microelectronics and Electronics Conference
Lausanne, che
2005
I
195
198
Delmonte, N.; Watts, B. E.; Rosa, L.; Chiorboli, G.; Cova, P.; Menozzi, R.
Test pattern for microwave dielectric properties of SrBi2Ta2O9 / Delmonte, N.; Watts, B. E.; Rosa, L.; Chiorboli, G.; Cova, P.; Menozzi, R.. - I:(2005), pp. 195-198. (Intervento presentato al convegno 2005 PhD Research in Microelectronics and Electronics Conference tenutosi a Lausanne, che nel 2005) [10.1109/RME.2005.1543044].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/1203401
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