We report in our research on semiconductor-based sensing layers deposited via thick-film technique. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by sol-gel method or laser-assisted spray pyrolysis. We also considered some techniques to maintain the stability of a nanostructure for long-term usage of the sensing layers. We detailed the preparation of screen printing pastes suitable for gas sensing application. Implementation of the sensing film on a low-power-consumption micromachined hotplate has also been addressed. The performance of such devices is presented and compared to that of conventional units. © 2002 Elsevier Science B.V. All rights reserved.
Gas sensing through thick film technology / Guidi, V.; Butturi, M. A.; Carotta, M. C.; Cavicchi, B.; Ferroni, M.; Malagu, C.; Martinelli, G.; Vincenzi, D.; Sacerdoti, M.; Zen, M.. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - 84:1(2002), pp. 72-77. [10.1016/S0925-4005(01)01077-2]
Gas sensing through thick film technology
Butturi M. A.;
2002
Abstract
We report in our research on semiconductor-based sensing layers deposited via thick-film technique. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by sol-gel method or laser-assisted spray pyrolysis. We also considered some techniques to maintain the stability of a nanostructure for long-term usage of the sensing layers. We detailed the preparation of screen printing pastes suitable for gas sensing application. Implementation of the sensing film on a low-power-consumption micromachined hotplate has also been addressed. The performance of such devices is presented and compared to that of conventional units. © 2002 Elsevier Science B.V. All rights reserved.
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