A low-consumption thick-film gas sensor based on micromachining methods has been designed, fabricated, and tested. It consists of a dielectric stacked membrane micromachined from bulk silicon, with an embedded polysilicon resistor as a heater, over which the gas-sensing layer was deposited by computer-aided screen printing. Power consumption as low as 30 mW turned out to be sufficient to react 400 °C for the sensing film. Measured electrothermal characteristics are in good agreement with the outcomes of 3D finite element simulations.
Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies / Vincenzi, D., Butturi, M.A., Guidi, V., Carotta, M.C., Martinelli, G., Guarnieri, V., Brida, S., Margesin, B., Giacomozzi, F., Zen, M., Giusti, D., Soncini, G., Vasiliev, A.A., Pisliakov, A.V.. - In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B. - ISSN 1071-1023. - 18:5(2000), pp. 2441-2445. [10.1116/1.1289546]
Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies
Butturi M. A.;
2000
Abstract
A low-consumption thick-film gas sensor based on micromachining methods has been designed, fabricated, and tested. It consists of a dielectric stacked membrane micromachined from bulk silicon, with an embedded polysilicon resistor as a heater, over which the gas-sensing layer was deposited by computer-aided screen printing. Power consumption as low as 30 mW turned out to be sufficient to react 400 °C for the sensing film. Measured electrothermal characteristics are in good agreement with the outcomes of 3D finite element simulations.
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