Ion implantation is proposed to produce self-standing bent monocrystals. A Si sample 0.2mm thick was bent to a radius of curvature of 10.5m. The sample curvature was characterized by interferometric measurements; the crystalline quality of the bulk was tested by X-ray diffraction in transmission geometry through synchrotron light at ESRF (Grenoble, France). Dislocations induced by ion implantation affect only a very superficial layer of the sample, namely, the damaged region is confined in a layer 1μm thick. Finally, an elective application of a deformed crystal through ion implantation is here proposed, i.e., the realization of a crystalline undulator to produce X-ray beams.

Ion implantation for manufacturing bent and periodically bent crystals / Bellucci, Valerio; Camattari, Riccardo; Guidi, Vincenzo; Mazzolari, Andrea; Paternã², Gianfranco; Mattei, Giovanni; Scian, Carlo; Lanzoni, Luca. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - 107:6(2015), pp. 1-5. [10.1063/1.4928553]

Ion implantation for manufacturing bent and periodically bent crystals

Lanzoni, Luca
2015

Abstract

Ion implantation is proposed to produce self-standing bent monocrystals. A Si sample 0.2mm thick was bent to a radius of curvature of 10.5m. The sample curvature was characterized by interferometric measurements; the crystalline quality of the bulk was tested by X-ray diffraction in transmission geometry through synchrotron light at ESRF (Grenoble, France). Dislocations induced by ion implantation affect only a very superficial layer of the sample, namely, the damaged region is confined in a layer 1μm thick. Finally, an elective application of a deformed crystal through ion implantation is here proposed, i.e., the realization of a crystalline undulator to produce X-ray beams.
2015
107
6
1
5
Ion implantation for manufacturing bent and periodically bent crystals / Bellucci, Valerio; Camattari, Riccardo; Guidi, Vincenzo; Mazzolari, Andrea; Paternã², Gianfranco; Mattei, Giovanni; Scian, Carlo; Lanzoni, Luca. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - 107:6(2015), pp. 1-5. [10.1063/1.4928553]
Bellucci, Valerio; Camattari, Riccardo; Guidi, Vincenzo; Mazzolari, Andrea; Paternã², Gianfranco; Mattei, Giovanni; Scian, Carlo; Lanzoni, Luca...espandi
File in questo prodotto:
File Dimensione Formato  
Lanzoni2015_APL.pdf

Accesso riservato

Descrizione: Articolo principale
Tipologia: Versione pubblicata dall'editore
Dimensione 1.39 MB
Formato Adobe PDF
1.39 MB Adobe PDF   Visualizza/Apri   Richiedi una copia
Pubblicazioni consigliate

Licenza Creative Commons
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/1151781
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 9
  • ???jsp.display-item.citation.isi??? 8
social impact