EnglishIn the present work a technique to impart a controlled deformation to a substrate through deposition of a thin film is shown. Such a technique allows film-substrate systems to be tailored with a desired shape for various applications. An analytical model has been applied to calculate the displacements and stresses of a patterned crystalline substrate. Analytical results have also been validated via Finite Element simulations. Si substrates have been patterned with Si3N4 and measurements of the transverse displacement were found to agree with the theoretical predictions. © 2011 Elsevier B.V. All rights reserved.
Patterning and modeling of mechanically bent silicon plates deformed through coactive stresses / Guidi, V.; Lanzoni, L.; Mazzolari, A.. - In: THIN SOLID FILMS. - ISSN 0040-6090. - 520:3(2011), pp. 1074-1079.
| Data di pubblicazione: | 2011 |
| Titolo: | Patterning and modeling of mechanically bent silicon plates deformed through coactive stresses |
| Autore/i: | Guidi, V.; Lanzoni, L.; Mazzolari, A. |
| Autore/i UNIMORE: | |
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1016/j.tsf.2011.09.008 |
| Rivista: | |
| Volume: | 520 |
| Fascicolo: | 3 |
| Pagina iniziale: | 1074 |
| Pagina finale: | 1079 |
| Codice identificativo ISI: | WOS:000298486600032 |
| Codice identificativo Scopus: | 2-s2.0-81855185303 |
| Citazione: | Patterning and modeling of mechanically bent silicon plates deformed through coactive stresses / Guidi, V.; Lanzoni, L.; Mazzolari, A.. - In: THIN SOLID FILMS. - ISSN 0040-6090. - 520:3(2011), pp. 1074-1079. |
| Tipologia | Articolo su rivista |
File in questo prodotto:
| File | Descrizione | Tipologia | |
|---|---|---|---|
| Lanzoni 2011_TSFs.pdf | Articolo principale | Versione dell'editore (versione pubblicata) | Administrator Richiedi una copia |
http://hdl.handle.net/11380/1151779
I documenti presenti in Iris Unimore sono rilasciati con licenza Creative Commons Attribuzione - Non commerciale - Non opere derivate 3.0 Italia, salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris
Copyright © 2021