Sub-MHz repetition rate femtosecond laser pulses produce extremely regular periodic surface structures on silicon surface due to competition between ultrafast heating and electron-emission. They allow manufacturing of novel devices for solar, optoelectronic, and biomedical applications.
Highly regular nanostructuring of Si surface by ultrashort laser pulses / Gnilitskyi, Iaroslav; Orazi, Leonardo; Bulgakova, Nadezhda M.; Gruzdev, Vitaly. - (2016). (Intervento presentato al convegno 2016 Conference on Lasers and Electro-Optics, CLEO 2016 tenutosi a usa nel 2016) [10.1364/cleo_si.2016.sth1q.4].
Highly regular nanostructuring of Si surface by ultrashort laser pulses
GNILITSKYI, IAROSLAV;ORAZI, Leonardo;
2016
Abstract
Sub-MHz repetition rate femtosecond laser pulses produce extremely regular periodic surface structures on silicon surface due to competition between ultrafast heating and electron-emission. They allow manufacturing of novel devices for solar, optoelectronic, and biomedical applications.
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