Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses

Gnilitskyi, Iaroslav; Gruzdev, Vitaly; Bulgakova, Nadezhda M.; Mocek, Tomáš; Orazi, Leonardo

doi:10.1063/1.4963784

Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acceptable speed is still a challenge. Here, we report a rapid formation of highly regular laser-induced periodic surface structures (HR-LIPSS) in the regime of strong ablation by infrared femtosecond laser pulses at sub-MHz repetition rate. Parameters of the laser-surface interactions and obtained experimental results suggest an important role of electrostatically assisted bond softening in initiating the HR-LIPSS formation.

Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses / Gnilitskyi, Iaroslav; Gruzdev, Vitaly; Bulgakova, Nadezhda M.; Mocek, Tomáš; Orazi, Leonardo. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - 109:14(2016), pp. 1-5.

Data di pubblicazione:	2016
Titolo:	Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses
Autore/i:	Gnilitskyi, Iaroslav; Gruzdev, Vitaly; Bulgakova, Nadezhda M.; Mocek, Tomáš; Orazi, Leonardo
Autore/i UNIMORE:	GNILITSKYI, IAROSLAV Gruzdev, Vitaly Bulgakova, Nadezhda M. Mocek, Tomáš ORAZI, Leonardo mostra contributor esterni nascondi contributor esterni
Digital Object Identifier (DOI):	http://dx.doi.org/10.1063/1.4963784
Rivista:	APPLIED PHYSICS LETTERS
Volume:	109
Fascicolo:	14
Pagina iniziale:	1
Pagina finale:	5
Codice identificativo ISI:	WOS:000386152800044
Codice identificativo Scopus:	2-s2.0-84989820011
Citazione:	Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses / Gnilitskyi, Iaroslav; Gruzdev, Vitaly; Bulgakova, Nadezhda M.; Mocek, Tomáš; Orazi, Leonardo. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - 109:14(2016), pp. 1-5.
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Utilizza questo identificativo per citare o creare un link a questo documento:
http://hdl.handle.net/11380/1132041

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