Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acceptable speed is still a challenge. Here, we report a rapid formation of highly regular laser-induced periodic surface structures (HR-LIPSS) in the regime of strong ablation by infrared femtosecond laser pulses at sub-MHz repetition rate. Parameters of the laser-surface interactions and obtained experimental results suggest an important role of electrostatically assisted bond softening in initiating the HR-LIPSS formation.
Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses / Gnilitskyi, Iaroslav; Gruzdev, Vitaly; Bulgakova, Nadezhda M.; Mocek, Tomáš; Orazi, Leonardo. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - 109:14(2016), pp. 1-5.
Data di pubblicazione: | 2016 |
Titolo: | Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses |
Autore/i: | Gnilitskyi, Iaroslav; Gruzdev, Vitaly; Bulgakova, Nadezhda M.; Mocek, Tomáš; Orazi, Leonardo |
Autore/i UNIMORE: | |
Digital Object Identifier (DOI): | http://dx.doi.org/10.1063/1.4963784 |
Rivista: | |
Volume: | 109 |
Fascicolo: | 14 |
Pagina iniziale: | 1 |
Pagina finale: | 5 |
Codice identificativo ISI: | WOS:000386152800044 |
Codice identificativo Scopus: | 2-s2.0-84989820011 |
Citazione: | Mechanisms of high-regularity periodic structuring of silicon surface by sub-MHz repetition rate ultrashort laser pulses / Gnilitskyi, Iaroslav; Gruzdev, Vitaly; Bulgakova, Nadezhda M.; Mocek, Tomáš; Orazi, Leonardo. - In: APPLIED PHYSICS LETTERS. - ISSN 0003-6951. - 109:14(2016), pp. 1-5. |
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