We propose a novel spectroscopic technique that allows determining the defect density distributions within metal-electrode-sandwiched dielectric based on J-V and C-V characteristics. The technique relies on determining "sensitivity regions" corresponding to the energy-spatial coordinates of defects affecting J-V and C-V curves. This technique is then demonstrated on RuOx/SrTiOx/RuOx metal-insulator-metal structures for DRAM capacitor applications.
Extraction of the Defect Distributions in DRAM Capacitor Using I-V and C-V Sensitivity Maps / Sereni, Gabriele; Larcher, Luca; Kaczer, Ben; Popovici, Mihaela Ioana. - In: IEEE ELECTRON DEVICE LETTERS. - ISSN 0741-3106. - 37:10(2016), pp. 1280-1283. [10.1109/LED.2016.2601012]
Extraction of the Defect Distributions in DRAM Capacitor Using I-V and C-V Sensitivity Maps
SERENI, GABRIELE;LARCHER, Luca;
2016
Abstract
We propose a novel spectroscopic technique that allows determining the defect density distributions within metal-electrode-sandwiched dielectric based on J-V and C-V characteristics. The technique relies on determining "sensitivity regions" corresponding to the energy-spatial coordinates of defects affecting J-V and C-V curves. This technique is then demonstrated on RuOx/SrTiOx/RuOx metal-insulator-metal structures for DRAM capacitor applications.
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