HfO2 is widely investigated as the favoured material for resistive RAM device implementation. The structural features of HfO2 play a fundamental role in the switching mechanisms governing resistive RAM operations, and a comprehensive understanding of the relation between the atomistic properties and final device behaviour is still missing. In addition, despite the fact that ultra-scaled 10 nm resistive RAM will probably be made of amorphous HfO2, a deeper investigation of the structure is necessary. In this paper, the classical molecular dynamics technique was used to investigate the disordered atomic configuration of amorphous HfO2. The influence of density on both the atomistic structure and the diffusion of O species was carefully analysed. The results achieved showthat the atomistic structure of an amorphous HfO2 system is strongly affected by the density, and the amorphous system is rearranged in an atomic configuration similar to the crystalline configuration at similar densities. The diffusion of oxygen atoms increases with the decrease of the density, consistent with a less-packed atomic structure which allows for easier movement of this species.

Molecular dynamics simulation of amorphous HfO2 for resistive RAM applications / Broglia, Giulia; G., Ori; Larcher, Luca; Montorsi, Monia. - In: MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING. - ISSN 0965-0393. - ELETTRONICO. - 22:6(2014), pp. 1-14. [10.1088/0965-0393/22/6/065006]

Molecular dynamics simulation of amorphous HfO2 for resistive RAM applications

BROGLIA, GIULIA;LARCHER, Luca;MONTORSI, Monia
2014

Abstract

HfO2 is widely investigated as the favoured material for resistive RAM device implementation. The structural features of HfO2 play a fundamental role in the switching mechanisms governing resistive RAM operations, and a comprehensive understanding of the relation between the atomistic properties and final device behaviour is still missing. In addition, despite the fact that ultra-scaled 10 nm resistive RAM will probably be made of amorphous HfO2, a deeper investigation of the structure is necessary. In this paper, the classical molecular dynamics technique was used to investigate the disordered atomic configuration of amorphous HfO2. The influence of density on both the atomistic structure and the diffusion of O species was carefully analysed. The results achieved showthat the atomistic structure of an amorphous HfO2 system is strongly affected by the density, and the amorphous system is rearranged in an atomic configuration similar to the crystalline configuration at similar densities. The diffusion of oxygen atoms increases with the decrease of the density, consistent with a less-packed atomic structure which allows for easier movement of this species.
2014
22
6
1
14
Molecular dynamics simulation of amorphous HfO2 for resistive RAM applications / Broglia, Giulia; G., Ori; Larcher, Luca; Montorsi, Monia. - In: MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING. - ISSN 0965-0393. - ELETTRONICO. - 22:6(2014), pp. 1-14. [10.1088/0965-0393/22/6/065006]
Broglia, Giulia; G., Ori; Larcher, Luca; Montorsi, Monia
File in questo prodotto:
File Dimensione Formato  
Articolo1_RRAM.pdf

Accesso riservato

Tipologia: Versione pubblicata dall'editore
Dimensione 668.32 kB
Formato Adobe PDF
668.32 kB Adobe PDF   Visualizza/Apri   Richiedi una copia
Pubblicazioni consigliate

Licenza Creative Commons
I metadati presenti in IRIS UNIMORE sono rilasciati con licenza Creative Commons CC0 1.0 Universal, mentre i file delle pubblicazioni sono rilasciati con licenza Attribuzione 4.0 Internazionale (CC BY 4.0), salvo diversa indicazione.
In caso di violazione di copyright, contattare Supporto Iris

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/1030722
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 49
  • ???jsp.display-item.citation.isi??? 46
social impact