A method, a product by the method and device of preparation of highly-regular periodic structure using a pulsed laser beam irradiating a spot on a surface of a substrate are disclosed. The method of direct formation of highly-regular periodic structure on a materials uses activation of Surface Electromagnetic Wave (SEW) interfering with the laser beam on the surface of the substrate in a manner which ensures high quality and regularity of the obtained pattern.
Method and System of Ultrafast Laser Writing of Highly-Regular Periodic Structures / Orazi, Leonardo; Gnilitskyi, Iaroslav; Derrien, Thibault; Bulgakhova, Nadezhda; Mocek, Tomáš. - (2017 Jul 11).
Method and System of Ultrafast Laser Writing of Highly-Regular Periodic Structures
Leonardo Orazi;Iaroslav Gnilitskyi;
2017
Abstract
A method, a product by the method and device of preparation of highly-regular periodic structure using a pulsed laser beam irradiating a spot on a surface of a substrate are disclosed. The method of direct formation of highly-regular periodic structure on a materials uses activation of Surface Electromagnetic Wave (SEW) interfering with the laser beam on the surface of the substrate in a manner which ensures high quality and regularity of the obtained pattern.File | Dimensione | Formato | |
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WO2018010707-PAMPH-20180118-2338.pdf
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