The Large Angle Convergent Beam Electron Diffraction (LACBED) technique has been applied to determination of the tetragonal mismatch in coherent Si/Si1-xGex/Si heterostructures. Two-dimensional (2D) dynamical simulation of the LACBED patterns has been performed and compared with the corresponding experimental ones. A good agreement is found in the whole simulated area, particularly as regards the splining of the Bragg contours, due to the strain field present in the TEM cross-sections. (C) 2000 Elsevier Science Ltd. All rights reserved.
Dynamical simulation of LACBED patterns in cross-sectioned heterostructures / Wu, F; Armigliato, A; Balboni, R; Frabboni, Stefano. - In: MICRON. - ISSN 0968-4328. - STAMPA. - 31:3(2000), pp. 211-216. [10.1016/S0968-4328(99)00085-2]
Dynamical simulation of LACBED patterns in cross-sectioned heterostructures
FRABBONI, Stefano
2000
Abstract
The Large Angle Convergent Beam Electron Diffraction (LACBED) technique has been applied to determination of the tetragonal mismatch in coherent Si/Si1-xGex/Si heterostructures. Two-dimensional (2D) dynamical simulation of the LACBED patterns has been performed and compared with the corresponding experimental ones. A good agreement is found in the whole simulated area, particularly as regards the splining of the Bragg contours, due to the strain field present in the TEM cross-sections. (C) 2000 Elsevier Science Ltd. All rights reserved.
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