The preparation of an array of nanocavities (NCs) in silicon via thermal treatments of high-fluence heliumimplantedsilicon is a well established process. The NCs have oered a powerful tool for the preparation of welldefined and ordered internal silicon surface, enabling the experimental investigation of its free energy. Here,instead, we interpret the NCs as an ideal nanolaboratory for the study of the adsorption and desorption of H2on silicon. We will present the determination of the internal pressure through the equilibrium abundances ofmono-hydride dimers and dihydrides obtained with infrared spectroscopy.

A Tool for the Spectroscopic Investigation of Hydrogen-Silicon Interaction / E., Romano; G. F., Cerofolini; D., Narducci; Corni, Federico; Frabboni, Stefano; Ottaviani, Giampiero; Tonini, Rita. - In: SURFACE AND INTERFACE ANALYSIS. - ISSN 0142-2421. - STAMPA. - 42:6-7(2010), pp. 1307-1310. [10.1002/sia.3242]

A Tool for the Spectroscopic Investigation of Hydrogen-Silicon Interaction

CORNI, Federico;FRABBONI, Stefano;OTTAVIANI, Giampiero;TONINI, Rita
2010

Abstract

The preparation of an array of nanocavities (NCs) in silicon via thermal treatments of high-fluence heliumimplantedsilicon is a well established process. The NCs have oered a powerful tool for the preparation of welldefined and ordered internal silicon surface, enabling the experimental investigation of its free energy. Here,instead, we interpret the NCs as an ideal nanolaboratory for the study of the adsorption and desorption of H2on silicon. We will present the determination of the internal pressure through the equilibrium abundances ofmono-hydride dimers and dihydrides obtained with infrared spectroscopy.
2010
42
6-7
1307
1310
A Tool for the Spectroscopic Investigation of Hydrogen-Silicon Interaction / E., Romano; G. F., Cerofolini; D., Narducci; Corni, Federico; Frabboni, Stefano; Ottaviani, Giampiero; Tonini, Rita. - In: SURFACE AND INTERFACE ANALYSIS. - ISSN 0142-2421. - STAMPA. - 42:6-7(2010), pp. 1307-1310. [10.1002/sia.3242]
E., Romano; G. F., Cerofolini; D., Narducci; Corni, Federico; Frabboni, Stefano; Ottaviani, Giampiero; Tonini, Rita
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/629809
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