The control of the chemical state of the inner surfaces of nanocavities (NCs) produced by the annealing of helium-implanted silicon has influence on lifetime control, gettering and wafer bonding. In this work it is demonstrated that the etching in HFaq of (1 0 0) silicon containing a buried array of NCs produces a giant injection of hydrogen with the consequent passivation of the inner surfaces, mainly via the formation of silicon monohydride at (1 1 1) faces and monohydride dimers at 2 × 1 reconstructed (1 0 0) faces. These terminations are very stable and survive heat treatments at 700 °C.

Hydrogen injection and retention in nanocavities of single-crystalline silicon / G. F., Cerofolini; E., Romano; D., Narducci; Corni, Federico; Frabboni, Stefano; Ottaviani, Giampiero; Tonini, Rita. - In: JOURNAL OF PHYSICS D. APPLIED PHYSICS. - ISSN 0022-3727. - STAMPA. - 42:6(2009), pp. 1-4. [10.1088/0022-3727/42/6/062001]

Hydrogen injection and retention in nanocavities of single-crystalline silicon

CORNI, Federico;FRABBONI, Stefano;OTTAVIANI, Giampiero;TONINI, Rita
2009

Abstract

The control of the chemical state of the inner surfaces of nanocavities (NCs) produced by the annealing of helium-implanted silicon has influence on lifetime control, gettering and wafer bonding. In this work it is demonstrated that the etching in HFaq of (1 0 0) silicon containing a buried array of NCs produces a giant injection of hydrogen with the consequent passivation of the inner surfaces, mainly via the formation of silicon monohydride at (1 1 1) faces and monohydride dimers at 2 × 1 reconstructed (1 0 0) faces. These terminations are very stable and survive heat treatments at 700 °C.
2009
42
6
1
4
Hydrogen injection and retention in nanocavities of single-crystalline silicon / G. F., Cerofolini; E., Romano; D., Narducci; Corni, Federico; Frabboni, Stefano; Ottaviani, Giampiero; Tonini, Rita. - In: JOURNAL OF PHYSICS D. APPLIED PHYSICS. - ISSN 0022-3727. - STAMPA. - 42:6(2009), pp. 1-4. [10.1088/0022-3727/42/6/062001]
G. F., Cerofolini; E., Romano; D., Narducci; Corni, Federico; Frabboni, Stefano; Ottaviani, Giampiero; Tonini, Rita
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/607898
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