We report on the latest results obtained from the development of a fabrication technology for PIN radiation detectors with on-chip front-end junction field effect transistors (JFETs) integrated on high-resistivity, FZ silicon. P-doped polysilicon back-side gettering prevented carrier lifetime degradation in spite of the relatively high thermal budget characterizing the fabrication process, allowing very low leakage currents to be obtained. Results from JFETs electrical characterization are presented, showing high transconductance and output resistance values as well as low gate currents and input capacitance. JFETs performance is not affected by the high reverse-bias voltage required for detector operation, making these devices suitable for the fabrication of monolithical preamplifiers integrated on the detector chip.

Silicon PIN radiation detectors with on-chip front-end junction field effect transistors / G. F., Dalla Betta; Verzellesi, Giovanni; M., Boscardin; L., Bosisio; G. U., Pignatel; L., Ferrario; M., Zen; G., Soncini. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT. - ISSN 0168-9002. - STAMPA. - 417:(1998), pp. 325-331.

Silicon PIN radiation detectors with on-chip front-end junction field effect transistors

VERZELLESI, Giovanni;
1998

Abstract

We report on the latest results obtained from the development of a fabrication technology for PIN radiation detectors with on-chip front-end junction field effect transistors (JFETs) integrated on high-resistivity, FZ silicon. P-doped polysilicon back-side gettering prevented carrier lifetime degradation in spite of the relatively high thermal budget characterizing the fabrication process, allowing very low leakage currents to be obtained. Results from JFETs electrical characterization are presented, showing high transconductance and output resistance values as well as low gate currents and input capacitance. JFETs performance is not affected by the high reverse-bias voltage required for detector operation, making these devices suitable for the fabrication of monolithical preamplifiers integrated on the detector chip.
1998
417
325
331
Silicon PIN radiation detectors with on-chip front-end junction field effect transistors / G. F., Dalla Betta; Verzellesi, Giovanni; M., Boscardin; L., Bosisio; G. U., Pignatel; L., Ferrario; M., Zen; G., Soncini. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT. - ISSN 0168-9002. - STAMPA. - 417:(1998), pp. 325-331.
G. F., Dalla Betta; Verzellesi, Giovanni; M., Boscardin; L., Bosisio; G. U., Pignatel; L., Ferrario; M., Zen; G., Soncini
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/17258
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