Surface nano- and microstructuring with additive and subtractive lithography techniques are commonly used in nanotechnology and photonics, while nanoimprint lithography and nanosphere lithography are used for creating periodic structures for plasmonics applications. Single step, maskless optical patterning techniques also exist, notably multi-beam interference based techniques and Laser Induced Periodic Surface Structures (LIPSS).
Highly-regular laser-induced periodic surface structures: Experiment and atomistic modelling / Gnilitskyi, Iaroslav; Shugaev, Maxim V.; Bulgakova, Nadezhda M.; Zhigilei, Leonid V.; Orazi, Leonardo. - 2017:(2017). (Intervento presentato al convegno European Quantum Electronics Conference, EQEC 2017 tenutosi a deu nel 2017) [10.1109/CLEOE-EQEC.2017.8087630].
Highly-regular laser-induced periodic surface structures: Experiment and atomistic modelling
Gnilitskyi, Iaroslav;Orazi, Leonardo
2017
Abstract
Surface nano- and microstructuring with additive and subtractive lithography techniques are commonly used in nanotechnology and photonics, while nanoimprint lithography and nanosphere lithography are used for creating periodic structures for plasmonics applications. Single step, maskless optical patterning techniques also exist, notably multi-beam interference based techniques and Laser Induced Periodic Surface Structures (LIPSS).
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