We propose a novel spectroscopic technique that allows determining the defect density distributions within metal-electrode-sandwiched dielectric based on J-V and C-V characteristics. The technique relies on determining "sensitivity regions" corresponding to the energy-spatial coordinates of defects affecting J-V and C-V curves. This technique is then demonstrated on RuOx/SrTiOx/RuOx metal-insulator-metal structures for DRAM capacitor applications.

Extraction of the Defect Distributions in DRAM Capacitor Using I-V and C-V Sensitivity Maps / Sereni, Gabriele; Larcher, Luca; Kaczer, Ben; Popovici, Mihaela Ioana. - In: IEEE ELECTRON DEVICE LETTERS. - ISSN 0741-3106. - 37:10(2016), pp. 1280-1283. [10.1109/LED.2016.2601012]

Extraction of the Defect Distributions in DRAM Capacitor Using I-V and C-V Sensitivity Maps

SERENI, GABRIELE;LARCHER, Luca;
2016

Abstract

We propose a novel spectroscopic technique that allows determining the defect density distributions within metal-electrode-sandwiched dielectric based on J-V and C-V characteristics. The technique relies on determining "sensitivity regions" corresponding to the energy-spatial coordinates of defects affecting J-V and C-V curves. This technique is then demonstrated on RuOx/SrTiOx/RuOx metal-insulator-metal structures for DRAM capacitor applications.
2016
37
10
1280
1283
Extraction of the Defect Distributions in DRAM Capacitor Using I-V and C-V Sensitivity Maps / Sereni, Gabriele; Larcher, Luca; Kaczer, Ben; Popovici, Mihaela Ioana. - In: IEEE ELECTRON DEVICE LETTERS. - ISSN 0741-3106. - 37:10(2016), pp. 1280-1283. [10.1109/LED.2016.2601012]
Sereni, Gabriele; Larcher, Luca; Kaczer, Ben; Popovici, Mihaela Ioana
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11380/1131090
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